X-ray Image Sensor
Enhancing efficiency and advancement in elemental and structural X-ray analysis
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Overview
The IMX711 is an X-ray image sensor that employs a direct conversion and integration type CMOS technology, in which X-rays and electron beams are detected directly.
It uses proprietary technology to achieve both high-speed capture and low noise performance, enabling the detection of weak single-photon signals*1, which is difficult with conventional integration type sensors.
This technology enables measurement with a wider dynamic range than conventional methods, offering from single-photon detection under low-flux conditions to stable and high-accuracy measurement in high-flux conditions.
The image sensor can capture energy, spatial, and temporal information simultaneously, which contributes to better measurement accuracy, measurement throughput, and flexible post-processing depending on the application and use casein advanced device inspection and scientific measurements such as materials science and life sciences.
*1) The IMX711 was developed with the collaboration between Sony Semiconductor Solutions Corporation and RIKEN. Based on a pixel structure invented by Dr. Takaki Hatsui of RIKEN, the two parties worked together on the technological development required to make it viable as a practical X-ray image sensor, including improving sensitivity and achieving high resistance to X-ray irradiation and high-voltage tolerance. Sony developed its circuit technology, manufacturing processes and packaging technology for mass production.
Features
Achieves the industry’s top class*2 of high-speed capture with low noise performance
Using proprietary technology, the IMX711 achieves the industry’s top class of high-speed capture performance for integration type X-ray image sensors as well as extremely low random noise performance.
In the field of X-ray measurement, two methods are used for different purposes: the photon‑counting method, which detects and counts individual X‑ray photons, and the charge‑integrating method, which integrates the total signal over an integration period. The photon-counting method is well suited for detecting signals under low-photon-flux conditions, as the noise can be suppressed using thresholds discrimination. By contrast, the integration method is well suited for high-flux conditions, as the signal is accumulated.
The IMX711, using the high-speed capture and low noise performance achieved through joint development with Dr. Hatsui Takaki’s lab at Riken, Japan, enabling the detection of weak single-photon signals, which is difficult with conventional integration type sensors.
*2) Among integration type X-ray CMOS image sensors, according to Sony research (as of announcement in June 2026).
Utilizing photon energy information under low-flux-conditions
The IMX711 enables single-photon detection at low X-ray energies thanks to its low readout noise, whereas such signals are typically buried in electronic noise in conventional integrating detectors. Its low-noise, low-variation readout also provides high energy resolution, enabling effective use of photon energy information in analysis.
Since no threshold-based energy filtering is required prior to measurement all photon energy information is retained and used in downstream analysis.
This enables the selection of energy ranges freely according to various purposes from a single measurement dataset, improving analysis efficiency and advancing analytical capabilities.
Capable of obtaining data with linear response even under high-flux conditions
Because the IMX711 is an integration type sensor, it does not suffer from photon counting loss as is seen with photon-counting sensors. Instead, it can maintain a linear response even under high-flux conditions.
Further, because high-speed capture allows for a lower signal storage capacity per frame, it can reduce signal saturation compared with the conventional integration method.
Utilizing this signal output and gain information during readout means that subsequent digital processing allows for data reconstruction across a wide dynamic range, with consistent signal handling from low to high flux.
This contributes to the acquisition of high-reproducibility and high-accuracy measurement data, even in X-ray measurement with pixels of significantly different incident intensities existing simultaneously within a sensor.
Specifications
| IMX711-AABY | |
|---|---|
| Image size | Diagonal 59.8 mm (Type 3.73) 27.88 mm (H) × 52.85 mm (V) |
| Number of active pixels | 384 (H) × 728 (V) - 16*1 Approx. 0.28 megapixels |
| Unit cell size | 72.6 μm (H) × 72.6 μm (V) |
| Substrate material | Silicon |
| Sensor thickness | 650 μm |
| Frame rate (All-pixel readout) |
26.1 k fps (Mode-A) 17.4 k fps (Mode-C Cont, HDR) |
| Noise | Typ 34 e-rms*2 Max 60 e-rms |
| Saturation count rate (12keV) | 0.94 Mcps/pixel (Mode-A) 33 Mcps/pixel (Mode-C Cont) 600 Mcps/pixel (Mode-C HDR) |
| Output interface | SLVS-EC |
| Package | Chip Size Package (CSP) : 30.36 mm (H) x 69.74 mm (V) |
 |
*1) Black pixels
*2) Typical value, averaged from measured values of active pixels at Tj = 20℃.
Sensitivity characteristics of X-ray
Application
Simultaneous crystal structure and elemental analysis
When developing a new battery or semiconductor material, it is essential to understand the atomic structure and the elemental composition of materials.
Conventionally, it has been necessary to measure each of them separately, using different detection equipment, but IMX711 now makes it possible to analyze both the structure and the composition in one single measurement. For example, when analyzing the crystal structure of battery materials, the elemental composition can be evaluated simultaneously. This significantly streamlines the analysis workflow.
The IMX711 can acquire energy values for each individual photon, enabling simultaneous measurement of the X-ray energy spectrum (b) and the scattered intensity distribution from the material (c). By utilizing this information, it becomes possible to estimate the crystal structure (d) with compositional information.
High-accuracy crystal structure analysis without metal filters
In X-ray structural analysis, unwanted wavelength components—such as fluorescence X-rays emitted from the sample or the X-ray source—act as noise and degrade the quality of diffraction measurements.
Conventionally, these noise components have been suppressed by adding metal filters. However, such filters also attenuate the required X-ray wavelengths, resulting in reduced measurement efficiency.
The IMX711 enables extraction of the required signals through post-processing of the measured data, eliminating the need for filters and contributing to high-precision measurements without loss of X-ray intensity.
The IMX711 acquires energy values for individual photons with high resolution, enabling removal of wavelength components that interfere with analysis in X-ray diffraction measurements. While signals such as the Cu-Kβ line are included when using the full energy range, selective data processing using only the required Cu-Kα line is possible for analysis.
Elemental color mapping
The IMX711 acquires energy values for individual photons with high resolution, enabling discrimination between elements with similar characteristic energies, as well as materials with similar absorption properties.
In addition to fluorescent X-ray analysis, this sensor enables elemental mapping using radiography (2D) and X-ray CT (3D) imaging.
It can be applied to a wide range of applications, including identification of trace elements and their spatial distribution in defect analysis, as well as investigation of underdrawings in artworks.
Improved efficiency in thin-film material analysis
In X-ray reflectivity measurements used for evaluating the quality of thin-film materials in semiconductor applications, reflected X-ray intensity from the film surface is measured to assess film thickness, density, and surface roughness with nanometer-level accuracy. These measurements require capturing both strong specular reflection curves and weak scattering signals, and conventionally have required multiple measurements under varying conditions.
The IMX711, with its wide dynamic range, enables data acquisition across the full angular range in a single measurement. This significantly reduces measurement time and improves quantitative accuracy by enabling measurements to be performed under consistent conditions.
This graph shows the X-ray reflectivity curve obtained with the IMX711, along with a curve fitted using a theoretical model.
Measurements were performed using a Cu-target rotating anode X-ray source (9 kW).
The fitted curve agrees well with the experimental data, demonstrating that X-ray intensity spanning up to approximately eight orders of magnitude can be measured with high accuracy.
Related sectors
Improved measurement efficiency in high-speed inspection of moving objects
In inspection processes for semiconductor and battery manufacturing, stable image acquisition is required even under high-speed operating conditions, such as during material transport or stage movement.
The IMX711 combines high-speed capture with low-noise performance, enabling high-resolution image acquisition even in moving environments. This contributes to both improved inspection accuracy and increased throughput.
| Subject | SD card |
|---|---|
| Rotation speed | Rotating at 2 revolution/s Moving at 70 m/min |
| X-ray source | Target element: Mo (molybdenum) Tube voltage: 40 kV Tube current: 140 mA |
Captured at 17.4 k fps
Credit: RIKEN, Japan
* Sales are restricted to "Group A" countries/regions under Japan's Export Trade Control Order, Appended Table 3.
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IMX711-AABY Product overview
This document summarizes the product overview, features, and specifications.
